Electronics manufacturing today demands not only ultra-high purity gases, but also a supply system engineered for stability, responsiveness, and scale. At Messer, we offer a full portfolio of electronic gases, from bulk gases to specialty mixtures, supported by localized production, strict quality control, and decades of operational experience. Trusted by leading manufacturers, we help our customers achieve precision and reliability in every critical step of their process.
What’s the Difference Between Bulk Gas and Specialty Gas?
Bulk electronic gases are the fundamental building blocks of semiconductor manufacturing, used in the largest volumes and across the broadest range of processes. These include high-purity O₂, N₂, Ar, H₂, He, and CO₂. They are widely used in key fabrication steps such as chamber cleaning, purification, inerting, carrier gas supply, and thermal management. Messer provides ultra-high purity levels up to 99.9999999% and offers multiple supply modes including tankers, on-site generation, and bulk storage to ensure continuous and reliable delivery. These solutions are designed to meet the dual demands of production stability and cost control in advanced manufacturing. With extensive operational experience, we have established long-term partnerships with leading fabs across China. If bulk gases are the “foundation” of the fab, electronic specialty gases are the “core” of the process. From thin film deposition, etching, doping, to cleaning, cooling, and atmospheric control, specialty gases are present throughout the micro-nano manufacturing chain, often referred to as the “lifeblood” of the electronics industry. Quality standards for electronic specialty gases are exceptionally strict. Leading semiconductor processes now require gas purity levels of 5N–6N (99.999%–99.9999%), with trace contaminant control down to ppt (10⁻¹²) levels. Even the slightest variation in gas quality can impact chip yield or result in entire batch losses. As such, purity, consistency, and supply reliability are critical to both production safety and process yield. Messer offers over 60 types of electronic specialty gases in China. As the domestic electronics sector continues to expand, we have made ongoing investments in three dedicated production sites to deliver fast, localized support and hazardous material logistics. For key customers, Messer maintains full control of the gas value chain and has established cross-plant backup mechanisms to ensure uninterrupted and safe supply under any emergency scenario. Depending on the gas type and purity level, our delivery formats include ISO containers, tube trailers, various cylinder sizes, Y-cylinders, and customized packaging options.
Electronic Specialty Gases at a Glance
| Category | Gas products |
|---|---|
| Synthesis | N₂O, B₂H₆, H₂, CO, Kr, Xe, Ne |
| Purified | N₂, Ar, He, H₂, CO₂, C₄F₆, C₄F₈, CH₃F, C₃H₆, C₂H₄ |
| Refilled | He, BCl₃, NH₃ |
| Blended：Customized mixing ratio available | |
| -Uitra-high purity mixtures: | H₂/N₂, He/N₂, O₂/He, H₂/He etc. |
| -Uitra-high purity mixtures | PH₃, SiH₄, S₂H₆, B₂H₆ 与 H₂/N₂/Ar/He etc. |
| -Ion Implantation mixtures | Kr/Ne, Ar/Xe/Ne, F₂/Ar/Ne, F₂/Kr/Ne , H₂/Ne, HCl/H₂/Ne, etc. |
Why Messer for Electronic Specialty Gases
A proven track record in semiconductor, flat panel display, and photonics sectors. Our regionally based industry teams have decades of experience in bulk gases and specialty product mixtures for the electronics industry, as well as related safety, health, regulatory and quality requirements.
We offer end-to-end high-purity gas engineering services covering the entire supply chain—from design, installation, and commissioning to safe operation and on-site logistics. Our services also support equipment relocation, deinstallation, and reinstallation as required.
Backed by strong local production and a reliable distribution network, we ensure prompt response and consistent, dependable supply for our customers.
What is Electronic-Grade Nitrous Oxide?
Supply Modes
ISO containers, tube trailers, Y-cylinders, and various steel cylinder packages.
Nitrous oxide, also known as laughing gas, is a colorless, slightly sweet gas commonly used as an anesthetic in the medical field. With the continuous advancement of semiconductor technology, electronic-grade N₂O has become a critical material for advanced manufacturing and specific dielectric processes.
In advanced PECVD (plasma-enhanced chemical vapor deposition) applications, N₂O plays an essential role in forming high-quality dielectric films such as SiOx. These films are used in high-density integrated circuits, helping improve device performance and reliability—particularly for DRAM, CMOS, OLED, and other microelectronic applications with demanding dielectric properties. In addition, N₂O is widely used in cleaning, surface treatment, and selective oxidation steps, supporting the removal of organic residues and enhancing process uniformity. As both an oxidant and nitridation agent, it is also well suited to advanced packaging and 3D integration steps that require precision atmosphere control and uniform thin-film growth.
It is worth noting that although N₂O is classified as a greenhouse gas, its usage in the electronics industry is highly controlled, and global emissions from this sector account for less than 1% of total N₂O discharge. With proper emission abatement, the environmental impact remains minimal.
Messer sources complete systems from top-tier global suppliers and is brings decades of manufacturing excellence, along with stringent QA protocols and technical expertise, to every production site. Our facilities in Suzhou, Chuzhou and Meishan manufacture electronic-grade nitrous oxide, with a combined annual capacity of 8,400 tons.
What is Electronic-Grade Carbon Dioxide?
Supply Modes
ISO containers, tube trailers, cylinders and customized packages
Electronic-grade carbon dioxide (CO₂) is a high-purity gas used in advanced semiconductor, display, MEMS, and advanced packaging processes. Typical purity levels reach 5N (99.999%) or higher. Compared with standard CO₂, electronic-grade CO₂ features enhanced control over acidic impurities, organics, moisture, and particulates, effectively minimizing contamination risks and helping ensure high product yields.
Thanks to its unique physical properties, electronic-grade CO₂ can be liquefied near ambient temperatures and under moderate pressure, making it suitable for on-site delivery in liquid form. It delivers excellent solvency and diffusivity in microstructure cleaning processes. These characteristics allow for efficient removal of organic residues, moisture, and particles while avoiding the drawbacks of traditional wet cleaning methods. This is particularly beneficial in protecting low-k materials, fine structures, and precision features in advanced device geometries.
In its supercritical state, CO₂ exhibits low surface tension, strong penetration ability, and outstanding solvency, making it ideal for post-etch cleaning, end-of-line (EOL) residue removal, and pre-packaging surface treatment. It is also widely used in plasma cleaning and conditioning processes, front-end/back-end separation, and selective EUV lithography cleaning steps. CO₂ also serves as a reliable auxiliary gas in these steps, supporting greater cleanliness and stability across the process.
With production facilities in Suzhou, Chuzhou, and Meishan, Messer manufactures up to 7,500 tons of electronic-grade CO₂ annually. Combining advanced imported system with years of quality control expertise, we ensure a stable and reliable supply of high-purity CO₂. Our strong local presence enables rapid response and enhanced delivery flexibility. We also provide tailored gas supply systems and technical support to help customers optimize their processes.
What is Electronic-Grade Diborane?
Diborane (B₂H₆) is a highly active electronic specialty gas commonly used in semiconductor and photovoltaic applications. It is often blended with carrier gases for safe and precise delivery. As a source of elemental boron, B₂H₆ is valued for its strong reducing properties and high reactivity. It plays an important role in chemical vapor deposition (CVD) processes, particularly for boron doping in semiconductor manufacturing. Its toxic and pyrophoric nature means that safe handling and gas purity are critical.
In semiconductor production, B₂H₆ is a typical dopant gas used in various plasma processes to introduce boron atoms into silicon or compound semiconductor substrates. It helps form stable p-type layers and is commonly used in processes such as plasma-enhanced chemical vapor deposition (PECVD), ion implantation, and atomic layer deposition (ALD). B₂H₆ can also be used to produce boron-based specialty compounds, including other boranes, boron halides, and boron-containing metal-organic precursors.
In the solar photovoltaic sector, B₂H₆ is primarily used to manufacture thin-film solar cells, especially copper indium gallium selenide (CIGS) cells, where it serves as a key doping source to improve carrier mobility and conversion efficiency. As the global renewable energy transition accelerates, B₂H₆ mixtures are being deployed in more solar and clean energy projects.
In China, Messer has established a robust local production and supply network for diborane mixtures. Our advanced facility in Chuzhou integrates European-imported equipment with in-house process expertise to ensure consistent product quality and safety. Transfilling centers in Suzhou and Meishan are seamlessly connected to a flexible logistics network, enabling fast and reliable deliveries across various regions. Supported by extensive application know-how and professional logistics capabilities, Messer offers tailored solutions based on customer needs—including customized gas purity levels, packaging formats, and supply modes.
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